Mechanisms of heat and oxygen transfer in silicon melt in an electromagnetic Czochralski system
| Autor: | Kakimoto, Koichi *, Tashiro, Akimasa, Shinozaki, Takashige, Ishii, Hideo, Hashimoto, Yoshio |
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| Zdroj: | In Journal of Crystal Growth 2002 243(1):55-65 |
| Databáze: | ScienceDirect |
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