Atomic layer growth of epitaxial TiO 2 thin films from TiCl 4 and H 2O on α-Al 2O 3 substrates
| Autor: | Aarik, Jaan *, Aidla, Aleks, Mändar, Hugo, Uustare, Teet, Schuisky, Mikael, Hårsta, Anders |
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| Zdroj: | In Journal of Crystal Growth 2002 242(1):189-198 |
| Databáze: | ScienceDirect |
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