Effects of stress on solid-phase epitaxial regrowth and corner defect generation in As +-implanted, two-dimensional amorphized Si
| Autor: | Shin, Yu Gyun, Lee, Jeong Yong *, Park, Moon Han, Kang, Ho Kyu |
|---|---|
| Zdroj: | In Journal of Crystal Growth 2001 231(1):107-114 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect