Implementation of integrated real-time multi-sensors on a multi-wafer production MBE system
| Autor: | Wang, Guang *, Ren, Ge, Le, Luan, Lee, Henry P, Pinsukanjana, Paul, Hubbard, Jared, Kao, Yung-Chung |
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| Zdroj: | In Journal of Crystal Growth 2001 227:238-243 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect