Precipitation and crystallization of nanometer Si clusters in annealed Si-rich SiO 2 films
| Autor: | You, Li-ping, Heng, C.L, Ma, S.Y, Ma, Z.C, Zong, W.H, Wu, Zheng-long, Qin, G.G * |
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| Zdroj: | In Journal of Crystal Growth 2000 212(1):109-114 |
| Databáze: | ScienceDirect |
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