Comparison of rigorous scattering models to accurately replicate the behaviour of scattered electromagnetic waves in optical surface metrology
| Autor: | Hooshmand, Helia, Pahl, Tobias, Hansen, Poul-Erik, Fu, Liwei, Birk, Alexander, Karamehmedović, Mirza, Lehmann, Peter, Reichelt, Stephan, Leach, Richard, Piano, Samanta |
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| Zdroj: | In Journal of Computational Physics 15 January 2025 521 Part 1 |
| Databáze: | ScienceDirect |
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