AEROSOL FORMATION UNDER HETEROGENEOUS/HOMOGENEOUS THERMAL DECOMPOSITION OF SILANE: EXPERIMENT AND NUMERICAL MODELING

Autor: Onischuk, A.A. *, Levykin, A.I., Strunin, V.P., Ushakova, M.A., Samoilova, R.I., Sabelfeld, K.K., Panfilov, V.N.
Zdroj: In Journal of Aerosol Science 2000 31(8):879-906
Databáze: ScienceDirect