AEROSOL FORMATION UNDER HETEROGENEOUS/HOMOGENEOUS THERMAL DECOMPOSITION OF SILANE: EXPERIMENT AND NUMERICAL MODELING
Autor: | Onischuk, A.A. *, Levykin, A.I., Strunin, V.P., Ushakova, M.A., Samoilova, R.I., Sabelfeld, K.K., Panfilov, V.N. |
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Zdroj: | In Journal of Aerosol Science 2000 31(8):879-906 |
Databáze: | ScienceDirect |
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