Towards understanding and restraining the mechanical relaxation effect in polishing silicon carbide with a detachable bonnet tool
Autor: | Zhang, Yifan, Feng, Jingbo, Zhao, Yuyang, Rao, Mengqi, Yin, Yuehong |
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Zdroj: | In International Journal of Mechanical Sciences 15 May 2023 246 |
Databáze: | ScienceDirect |
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