Towards understanding and restraining the mechanical relaxation effect in polishing silicon carbide with a detachable bonnet tool

Autor: Zhang, Yifan, Feng, Jingbo, Zhao, Yuyang, Rao, Mengqi, Yin, Yuehong
Zdroj: In International Journal of Mechanical Sciences 15 May 2023 246
Databáze: ScienceDirect