Modeling and control of a novel X–Y parallel piezoelectric-actuator driven nanopositioner
Autor: | Liu, Pengbo, Yan, Peng, Zhang, Zhen, Leng, Tongtong |
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Zdroj: | In ISA Transactions May 2015 56:145-154 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Liu, Pengbo, Yan, Peng, Zhang, Zhen, Leng, Tongtong |
---|---|
Zdroj: | In ISA Transactions May 2015 56:145-154 |
Databáze: | ScienceDirect |
Externí odkaz: |