The use of AFM in assessing the crack resistance of silicon wafers of various orientations
| Autor: | Lapitskaya, Vasilina A., Kuznetsova, Tatyana A., Khabarava, Anastasiya V., Chizhik, Sergei A., Aizikovich, Sergei M., Sadyrin, Evgeniy V., Mitrin, Boris I., Sun, Weifu |
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| Zdroj: | In Engineering Fracture Mechanics January 2022 259 |
| Databáze: | ScienceDirect |
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