Effect of intermolecular and intramolecular synergism on the inhibition from hybrid additives in damascene copper electrodeposition
Autor: | Han, Silin, Chang, Pengfei, Zhou, Zihan, Wu, Yunwen, Li, Ming, Hang, Tao ⁎ |
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Zdroj: | In Electrochimica Acta 10 April 2024 483 |
Databáze: | ScienceDirect |
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