Effect of intermolecular and intramolecular synergism on the inhibition from hybrid additives in damascene copper electrodeposition

Autor: Han, Silin, Chang, Pengfei, Zhou, Zihan, Wu, Yunwen, Li, Ming, Hang, Tao
Zdroj: In Electrochimica Acta 10 April 2024 483
Databáze: ScienceDirect