Corrosion mechanism in PVD deposited nano-scale titanium nitride thin film with intercalated titanium for protecting the surface of silicon
| Autor: | Chaudhry, A.U., Mansoor, Bilal, Mungole, Tarang, Ayoub, Georges, Field, David P. |
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| Zdroj: | In Electrochimica Acta 20 February 2018 264:69-82 |
| Databáze: | ScienceDirect |
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