Electrodeposition of Ru by atomic layer deposition (ALD)
| Autor: | Thambidurai, Chandru, Kim, Youn-Geun, Stickney, John L. |
|---|---|
| Zdroj: | In Electrochimica Acta 2008 53(21):6157-6164 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Thambidurai, Chandru, Kim, Youn-Geun, Stickney, John L. |
|---|---|
| Zdroj: | In Electrochimica Acta 2008 53(21):6157-6164 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect