Adaptive mass alteration to model ion–ion recombination in a Particle-in-Cell simulation of silane radio-frequency discharges
| Autor: | Snytnikov, A.V., Vshivkov, V.A., Goedheer, W.J. |
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| Zdroj: | In Computer Physics Communications 2010 181(10):1743-1749 |
| Databáze: | ScienceDirect |
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