Stationary and non-stationary etching of Si(100) surfaces with gas phase and adsorbed hydrogen
| Autor: | Dinger, A a, Lutterloh, C a, Küppers, J a, b, * |
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| Zdroj: | In Chemical Physics Letters 2000 320(5):405-410 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Dinger, A a, Lutterloh, C a, Küppers, J a, b, * |
|---|---|
| Zdroj: | In Chemical Physics Letters 2000 320(5):405-410 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect