Precursor gas composition optimisation for large area boron doped nano-crystalline diamond growth by MW-LA-PECVD
| Autor: | Taylor, A., Ashcheulov, P., Hubík, P., Klimša, L., Kopeček, J., Remeš, Z., Vlčková Živcová, Z., Remzová, M., Kavan, L., Scheid, E., Lorinčík, J., Mortet, V. |
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| Zdroj: | In Carbon March 2018 128:164-171 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect