A method to form self-aligned carbon-nanotube-vias using a Ta-cap layer on a Co-catalyst
| Autor: | Liu, Tzu-Ling, Wu, Hsin-Wei, Wang, Chiu-Yen, Chen, Szu-Ying, Hung, Min-Hsiu, Yew, Tri-Rung |
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| Zdroj: | In Carbon May 2013 56:366-373 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect