A novel dark field in-process optical inspection method for micro-openings on mirrored surfaces beyond the diffraction limit using active phase control
| Autor: | Takahashi, S., Yokozeki, H., Fujii, D., Kudo, R., Takamasu, K. |
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| Zdroj: | In CIRP Annals - Manufacturing Technology 2014 63(1):465-468 |
| Databáze: | ScienceDirect |
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