Audible vibration diagnostics of thermo-elastic residual stress in multi-crystalline silicon wafers
| Autor: | Best, S.R., Hess, D.P., Belyaev, A., Ostapenko, S., Kalejs, J.P. |
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| Zdroj: | In Applied Acoustics 2006 67(6):541-549 |
| Databáze: | ScienceDirect |
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