Fabrication of 1D nanofluidic channels on glass substrate by wet etching and room-temperature bonding

Autor: He, Qiaohong, Chen, Shuang, Su, Yuan, Fang, Qun, Chen, Hengwu
Zdroj: In Analytica Chimica Acta 2008 628(1):1-8
Databáze: ScienceDirect