Chapter Forty Two - Hermeticity Tests
| Autor: | Reinert, Wolfgang, Kähler, Dirk |
|---|---|
| Zdroj: | In Handbook of Silicon Based MEMS Materials and Technologies 2010:607-616 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Reinert, Wolfgang, Kähler, Dirk |
|---|---|
| Zdroj: | In Handbook of Silicon Based MEMS Materials and Technologies 2010:607-616 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|