Chapter Twenty Six - Atomic Layer Deposition in MEMS Technology
| Autor: | Puurunen, Riikka L., Kattelus, Hannu, Suntola, Tuomo |
|---|---|
| Zdroj: | In Handbook of Silicon Based MEMS Materials and Technologies 2010:433-446 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Puurunen, Riikka L., Kattelus, Hannu, Suntola, Tuomo |
|---|---|
| Zdroj: | In Handbook of Silicon Based MEMS Materials and Technologies 2010:433-446 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|