Development and applications of a beam energy filter for the PI9200XJ high current implanter
| Autor: | Adibi, Babak, Turner, Norman L., Marin, Tony, Lecouras, George T., Macklin, Ronald J., Boyd, Wendell J., Wagner, Dennis W., Wriggins, Walter J. |
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| Zdroj: | In Ion Implantation Technology - 92 1993:601-606 |
| Databáze: | ScienceDirect |
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