Chapter 4 - Epitaxial growth processes for high performance advanced CMOS devices
| Autor: | Mochizuki, Shogo |
|---|---|
| Zdroj: | In Handbook of Thin Film Deposition Edition: Fifth Edition. 2025:141-192 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Mochizuki, Shogo |
|---|---|
| Zdroj: | In Handbook of Thin Film Deposition Edition: Fifth Edition. 2025:141-192 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|