Appendix 2 - Nanoindentation Characterization of Silicon and Other MEMS Materials
| Autor: | Zachariasz, P., Brudziński, K., Gronicz, J., Nagao, S., Nowak, R. |
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| Zdroj: | In Handbook of Silicon Based MEMS Materials and Technologies Edition: Second Edition. 2016:771-775 |
| Databáze: | ScienceDirect |
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