List of Contributors

Autor: Aalto, Timo, Airaksinen, Veli-Matti, Amiotti, Marco, Anttila, Olli, Bonucci, Antonio, Brudziński, K., Candler, Rob N., Cao, Zhen, Chen, Kuo-Shen, Conte, Andrea, Davis, Cristina E., Dixit, Pradeep, Dragoi, Viorel, Eränen, Simo, Fischer, Andreas C., Franssila, Sami, Friedberger, Alois, Ganchenkova, Maria, Gonzalez, Pilar, Gosálvez, Miguel A., Gronicz, J., Haapalinna, Atte, Hagelin, Paul M., Hammond, Paul, Henttinen, Kimmo, Horsley, David, Inoue, Akihisa, Jakobsen, Henrik, Jonsson, Kerstin, Kähler, Dirk, Kattelus, Hannu, Knechtel, Roy, Knese, Kathrin, Kolari, Kai, Koskenvuori, Mika, Kuisma, Heikki, Kulkarni, Amit, Laermer, Franz, Lapadatu, Adriana Cozma, Leinenbach, Christina, LeVasseur, Michael K., Li, Jue, Lindner, Paul, Lindroos, Veikki, Lofink, Fabian, Longoni, Giorgio, Mäkinen, Jari, Mäntysalo, Matti, Martin, Devin, Mattila, Toni, Mauri, Luca, Merz, Peter, Meyer, Doug, Moraja, Marco, Motooka, Teruaki, Müller, Gerhard, Muralt, Paul, Nagao, S., Nieminen, Risto M., Niklaus, Frank, Nowak, R., Olkkonen, Juuso, Ou, Kuang-Shun, Paloheimo, Jari, Paulasto-Kröckel, Mervi, Pohjonen, Helena, Pressel, Klaus, Putkonen, Matti, Puurunen, Riikka L., Reinert, Wolfgang, Rizzi, Enea, Rottenberg, Xavier, Ryhänen, Tapani, Sainiemi, Lauri, Savin, Hele, Sharma, Parmanand, Sullivan, Scott, Suni, Tommi, Theuss, Horst, Tilli, Markku, Tittonen, Ilkka, Tofteberg, Hannah, Törmä, Pekka, Tuomikoski, Santeri, Tyholdt, Frode, Uda, Tsuyoshi, Vallin, Örjan, Veijola, Timo, Viinikka, Eeva, Vogl, Andreas, Vuorinen, Vesa, Yobas, Levent, Zachariasz, P., Zubel, I.
Zdroj: In Handbook of Silicon Based MEMS Materials and Technologies Edition: Second Edition. 2016:xiii-xv
Databáze: ScienceDirect