Chapter 40 - Hermeticity Tests
| Autor: | Lofink, Fabian, Kähler, Dirk, Reinert, Wolfgang |
|---|---|
| Zdroj: | In Handbook of Silicon Based MEMS Materials and Technologies Edition: Second Edition. 2016:734-743 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Lofink, Fabian, Kähler, Dirk, Reinert, Wolfgang |
|---|---|
| Zdroj: | In Handbook of Silicon Based MEMS Materials and Technologies Edition: Second Edition. 2016:734-743 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|