Chapter 39 - Outgassing and Gettering
| Autor: | Rizzi, Enea, Mauri, Luca, Moraja, Marco, Conte, Andrea, Bonucci, Antonio, Longoni, Giorgio, Amiotti, Marco |
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| Zdroj: | In Handbook of Silicon Based MEMS Materials and Technologies Edition: Second Edition. 2016:713-733 |
| Databáze: | ScienceDirect |
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