Chapter 29 - Silicon Direct Bonding
| Autor: | Henttinen, Kimmo, Suni, Tommi |
|---|---|
| Zdroj: | In Handbook of Silicon Based MEMS Materials and Technologies Edition: Second Edition. 2016:591-598 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Henttinen, Kimmo, Suni, Tommi |
|---|---|
| Zdroj: | In Handbook of Silicon Based MEMS Materials and Technologies Edition: Second Edition. 2016:591-598 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|