Chapter 21 - Deep Reactive Ion Etching
| Autor: | Laermer, Franz, Franssila, Sami, Sainiemi, Lauri, Kolari, Kai |
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| Zdroj: | In Handbook of Silicon Based MEMS Materials and Technologies Edition: Second Edition. 2016:444-469 |
| Databáze: | ScienceDirect |
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