Chapter 13 - Gas Damping in Vibrating MEMS Structures
| Autor: | Veijola, Timo |
|---|---|
| Zdroj: | In Handbook of Silicon Based MEMS Materials and Technologies Edition: Second Edition. 2016:354-373 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Veijola, Timo |
|---|---|
| Zdroj: | In Handbook of Silicon Based MEMS Materials and Technologies Edition: Second Edition. 2016:354-373 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|