Chapter 7 - Thick-Film SOI Wafers: Preparation and Properties
| Autor: | Mäkinen, Jari, Suni, Tommi |
|---|---|
| Zdroj: | In Handbook of Silicon Based MEMS Materials and Technologies Edition: Second Edition. 2016:206-237 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Mäkinen, Jari, Suni, Tommi |
|---|---|
| Zdroj: | In Handbook of Silicon Based MEMS Materials and Technologies Edition: Second Edition. 2016:206-237 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|