Chapter 42 - Hermeticity tests
| Autor: | Kähler, Dirk, Lofink, Fabian, Reinert, Wolfgang |
|---|---|
| Zdroj: | In Handbook of Silicon Based MEMS Materials and Technologies Edition: Third Edition. 2020:833-843 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Kähler, Dirk, Lofink, Fabian, Reinert, Wolfgang |
|---|---|
| Zdroj: | In Handbook of Silicon Based MEMS Materials and Technologies Edition: Third Edition. 2020:833-843 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|