Chapter 30 - Encapsulation by film deposition
| Autor: | Candler, Rob N., Hagelin, Paul, Cameron, Christopher |
|---|---|
| Zdroj: | In Handbook of Silicon Based MEMS Materials and Technologies Edition: Third Edition. 2020:669-676 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Candler, Rob N., Hagelin, Paul, Cameron, Christopher |
|---|---|
| Zdroj: | In Handbook of Silicon Based MEMS Materials and Technologies Edition: Third Edition. 2020:669-676 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|