Chapter 21 - Inkjet printing, laser-based micromachining, and micro–3D printing technologies for MEMS
| Autor: | Fischer, Andreas C., Mäntysalo, Matti, Niklaus, Frank |
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| Zdroj: | In Handbook of Silicon Based MEMS Materials and Technologies Edition: Third Edition. 2020:531-545 |
| Databáze: | ScienceDirect |
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