Chapter 10 - Electrostatic and RF-properties of MEMS structures
| Autor: | Tittonen, Ilkka, Koskenvuori, Mika |
|---|---|
| Zdroj: | In Handbook of Silicon Based MEMS Materials and Technologies Edition: Third Edition. 2020:305-324 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Tittonen, Ilkka, Koskenvuori, Mika |
|---|---|
| Zdroj: | In Handbook of Silicon Based MEMS Materials and Technologies Edition: Third Edition. 2020:305-324 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|