Chapter 5 - Limits of Gate Dielectrics Scaling
| Autor: | Siddiqui, Shahab, Ando, Takashi, Pandey, Rajan K., Schepis, Dominic |
|---|---|
| Zdroj: | In Handbook of Thin Film Deposition Edition: Fourth Edition. 2018:107-145 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Siddiqui, Shahab, Ando, Takashi, Pandey, Rajan K., Schepis, Dominic |
|---|---|
| Zdroj: | In Handbook of Thin Film Deposition Edition: Fourth Edition. 2018:107-145 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|