Micro- and nano- structuring using ion beams
Autor: | Dietzel, A., Bruenger, W.H., Loeschner, H., Platzgummer, E. |
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Zdroj: | In 4M 2006 - Second International Conference on Multi-Material Micro Manufacture 2006:9-12 |
Databáze: | ScienceDirect |
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