High-density silicon nitride thin film in PECVD
| Autor: | Reynes, Brigitte, Bruyère, Jean Claude |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 1992 32(1):303-306 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Reynes, Brigitte, Bruyère, Jean Claude |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 1992 32(1):303-306 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|