Performance optimization of a high-repetition-rate KrF laser plasma x-ray source for microlithography
| Autor: | Bijkerk, Fred, Louis, Eric, van der Wiel, Marnix J., Turcu, Edmond C.I., Tallents, Greg J., Batani, Dimitri |
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| Zdroj: | In Journal of X-Ray Science and Technology 1992 3(2):133-151 |
| Databáze: | ScienceDirect |
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