Effect of temperature on the deposition rate and properties of hydrogenated amorphous carbon films
| Autor: | Wood, Peter, Wydeven, Ted, Tsuji, Osamu |
|---|---|
| Zdroj: | In Surface & Coatings Technology 1991 49(1):399-405 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Wood, Peter, Wydeven, Ted, Tsuji, Osamu |
|---|---|
| Zdroj: | In Surface & Coatings Technology 1991 49(1):399-405 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|