First-order isothermal desorption kinetics of chlorine on SiH 2Cl 2-adsorbed Si(100) surface
| Autor: | Sakamoto, Hitoshi, Takakuwa, Yuji, Hori, Toyokazu, Horie, Tetsuhiro, Miyamoto, Nobuo |
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| Zdroj: | In Applied Surface Science 1994 75(1):27-32 |
| Databáze: | ScienceDirect |
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