Automatic measurement of thickness and uniformity of thin films by a computer aided device
| Autor: | Dellera, Pierluigi, Gadioli, Ettore, Guazzoni, Paolo, Vergani, Paolo, Zetta, Luisa |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, A 1993 334(1):211-216 |
| Databáze: | ScienceDirect |
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