Ion-implanted capacitively coupled silicon strip detectors with integrated polysilicon bias resistors processed on a 100 mm wafer
Autor: | Hietanen, Iiro, Lindgren, Jukka, Orava, Risto, Tuuva, Tuure, Voutilainen, Martti, Brenner, Richard, Andersson, Mikael, Leinonen, Kari, Ronkainen, Hannu |
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Zdroj: | In Nuclear Inst. and Methods in Physics Research, A 1991 310(3):671-676 |
Databáze: | ScienceDirect |
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