Channeling control for large tilt angle implantation in Si 〈100〉
| Autor: | Simonton, Robert B., Kamenitsa, Dennis E., Ray, Andrew M., Park, Changhae, Klein, Kevin M., Tasch, Al F. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 1991 55(1):39-44 |
| Databáze: | ScienceDirect |
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