Real time, in situ particle monitoring of the Applied Materials PI9200 ion implanter
| Autor: | Leung, Samuel, Adibi, Babak, Moffatt, Steve, Fishkin, Boris, Kinney, Pat |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 1991 55(1):35-38 |
| Databáze: | ScienceDirect |
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