Higher charge state ion beam purity in the Eaton medium current implanter
| Autor: | Simonton, Robert, King, Monty, Kamenitsa, Dennis E. |
|---|---|
| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 1989 37:616-619 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Simonton, Robert, King, Monty, Kamenitsa, Dennis E. |
|---|---|
| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 1989 37:616-619 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|