NV-6208: A midcurrent ion implanter with constant beam angle of incidence
| Autor: | Fleming, Jimmy L., Dykstra, Jerald P., King, Monty L., Ray, Andy M., Simonton, Robert B. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 1989 37:601-604 |
| Databáze: | ScienceDirect |
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