Optimum operation of the beamwriter [TM] electron gun with independent bias control
| Autor: | Chisholm, Tom, Roelofs, Rob |
|---|---|
| Zdroj: | In Microelectronic Engineering 1990 11(1):337-342 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Chisholm, Tom, Roelofs, Rob |
|---|---|
| Zdroj: | In Microelectronic Engineering 1990 11(1):337-342 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|