Metal droplet beams in M.E. technology: Production, focusing and deposition
| Autor: | Assayag, Gérard Ben, Sudraud, Pierre, Alaoui, Fathia, Swanson, L.W. |
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| Zdroj: | In Microelectronic Engineering 1987 6(1):349-354 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Assayag, Gérard Ben, Sudraud, Pierre, Alaoui, Fathia, Swanson, L.W. |
|---|---|
| Zdroj: | In Microelectronic Engineering 1987 6(1):349-354 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|